椭偏仪可以测什么？以及在工业上的应用

<p><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-from-paste="1" data-diagnose-id="575924ce7d183f7e1d4cfd3e132a6a08">椭偏仪</span><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-fake="1" data-diagnose-id="fb05be21f929104899d076c8b091705b" data-from-paste="1">有着测量精度高、快速多次测量且长期可靠性的优点，常常被用来检测化学材料微观结构、超薄膜厚度等实验。科研人员发现椭偏仪可以和很多技术并用，比如：</span><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-from-paste="1" data-diagnose-id="148b1310e537cde4fc33425cc7b1c453">原子力显微镜</span><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-fake="1" data-diagnose-id="658972e739f68c49352590ee9279692c" data-from-paste="1">、</span><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-from-paste="1" data-diagnose-id="cb31c2f421813156ebaeae6c6789a046">拉曼光谱仪</span><span style="max-width: 100%; font-family: arial; font-size: 18px; background-color: #ffffff;" data-fake="1" data-diagnose-id="36f7f63946c0fe35bfff353252f1f47e" data-from-paste="1">等。这使椭偏仪被广泛地运用在研究材料、生物以及医药制造等领域中。</span></p> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 28px; font-family: arial; background-color: #ffffff;"> <h3 style="margin: 0px; padding: 0px; font-size: 18px; overflow-y: auto; max-width: 100%;" data-diagnose-id="693adfc019b3aebf57c37d149baa9ba7"><span style="color: #236fa1;"><a style="color: #236fa1;" title="椭偏仪（ELL）" href="https://www.kexingtest.com/instrument/detail?id=223" target="_blank" rel="noopener">椭偏仪</a></span>的工作原理：</h3> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; color: #000000; overflow-wrap: break-word; padding: 0px !important; margin: 5px 0px !important 5px 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="76a1e58433b6e9b6c494ec7c57b4f4c8">入射光束（线偏振光）的电场可以在两个垂直平面上分解为矢量元。</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="5ed4b282472b95dbd55ceb2d9b0c1033">P</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="59e0d58db2b9189e63e5b29a8f2b047a">平面包含入射光和出射光，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="861a4636f6a83a65834060c6520d8942">s</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8c215b25d1dd1cfe7b56e49d7d47aaa5">平面则是与这个平面垂直。类似的，反射光或透射光是典型的椭圆偏振光，因此仪器被称为椭偏仪。在物理学上，偏振态的变化可以用复数ρ来表示：其中</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="4250e96416b1409a37a50b8b3effab57" data-from-paste="1">，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="70fc6d6964007162cba0f9a07d74e4ad">ψ和分别描述反射光</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="d64d280b35a83804c82be5a8f37cd35b">p</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="dad60896b0304d5545fb214ee3f7900d">波与</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="cfdd525871bb24964264e5670c5188af">s</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="0fcf249e6c1bf7a98ae2a1856d68f0c6">波振幅衰减比和相位差。</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="4ed3493f203dbb1ec76b4e450e4db0d4">P</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8e25513ddd4caad248493bb222c0d920">平面和</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="cf3eeaf008be7dc99c73e4288299988c">s</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="d3bd090333cb31d5ac12d29571123acc">平面上的</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="cbcec9732661c7c2bc9092f3d8352664">Fresnel</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="182a6eb062fdc5e0146c21407b7f272e">反射系数分别用复函数</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c611aec4318c22badea176de55ff82f9">rp</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="5ea1ff873061d719a1844488bef64276">和</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="a477b06d75287e462a710c1f68432ee6">rs</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="fb650ed902dd45be3654899fe9bee741">来表示。</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="14612b1035f38c5503cc50691d7b0a1a">rp</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="fff62873f54e713d50fb262e90d9c001">和</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="91738be14d5e9e71193295654d237b10">rs</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="9ee4de0ef3569c86117df52528597993">的数学表达式可以用</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="7898ac3a71b83372aad0d3af7ff1d3b1">Maxwell</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="86a28ea2c31718fcfe5d505eae05eee9">方程在不同材料边界上的电磁辐射推到得到。</span></p> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; color: #000000; overflow-wrap: break-word; padding: 0px !important; margin: 5px 0px !important 5px 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="2cc96c1b4e29fc14a8baa01521e32757">其中</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="a33fba5a08ccc52a5d1ce433c6a40f5c">0</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="00f27d9f3f7d704c3665c115a106e3c0">是入射角，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="35b40848dce690d0e0cfe06f841d19d9">1</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="20deebab63f7ed67ac2317785769d025">是折射角。入射角为入射光束和待研究表面法线的夹角。通常椭偏仪的入射角范围是</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="d1ea7d4955ffb523a7b2e4c6dcf3aba3">45</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="43f306eb565f9e41963ee10ef7a62241">°到</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="76c2a41488efbe78509a4ef1a27de82e">90</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="072429f32ca591c47b16ca3266f081d8" data-from-paste="1">°。这样在探测材料属性时可以提供最佳的灵敏度。每层介质的折射率可以用下面的复函数表示</span></p> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; color: #000000; overflow-wrap: break-word; padding: 0px !important; margin: 5px 0px !important 5px 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="bb267caeec14ca6e3a90f43e98a67cfb">通常</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="31ac8f187ab6841b3bf6247342311241">n</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c49f87ceb24f0f33c68d40625deac9f4">称为折射率，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e099cb776dc36a937d41f9911ca21c19">k</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="56b26fa290a78b1b328c955820bd7854">称为消光系数。这两个系数用来描述入射光如何与材料相互作用。它们被称为光学常数。实际上，尽管这个值是随着波长、温度等参数变化而变化的。当待测样品周围介质是空气或真空的时候，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="62b8b7730532c85a44f185a99a9005d4">N0</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="5185bc5d42ff237f55d23e4242ad8091">的值通常取</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8180c0c7eac383d508070ea9b7bc1900">1.000</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="5fa5befa481cab088fb213c4412a1f8b">。</span></p> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; color: #000000; overflow-wrap: break-word; padding: 0px !important; margin: 5px 0px !important 5px 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="520a15bf50ef9499580185482cea3520">通常椭偏仪测量作为波长和入射角函数的</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="f6d854e4bd821590a145678f078b1799">ρ的值（经常以ψ和或相关的量表示）。一次测量完成以后，所得的数据用来分析得到光学常数，膜层厚度，以及其他感兴趣的参数值。</span></p> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <h3 style="margin: 0px; padding: 0px; font-size: 18px; overflow-y: auto; max-width: 100%;" data-diagnose-id="5c8a0e5075e8944d35626324d52b26e7">椭偏仪在各工业的应用</h3> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="8e31f873a7a5ac2e6fb99bceee88c30f"><span style="max-width: 100%;" data-fake="1" data-from-paste="1" data-diagnose-id="b6cc58d60e2639b95528b1e537647a5c">1</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e602a7986fde7a50a2a97e1c8208b423">、可用于实验室研究，教学，在线制程监控，工业品质控制等应用。</span></span></p> </div> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="5d54f8a90b3f8d5b615848f823f9f5fd"><span style="max-width: 100%;" data-fake="1" data-from-paste="1" data-diagnose-id="7ed67df06aff769e7add19e6d5d2365b">2</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="760912959bcbfa84402c9efc118b6076">、半导体行业：硅的氧化物和氮化物，高和低</span><span style="max-width: 100%;" data-fake="1" data-from-paste="1" data-diagnose-id="2ed1e7134a02abca0f96798fe421ef9b">k</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8ef56eb53a8ae7f062c79262944d35e1">介质、多晶和非晶硅薄膜，光刻胶。</span></span></p> </div> <p> </p> <div class="dpu8C _2kCxD " style="max-width: 100%; overflow-x: visible; font-size: 18px; line-height: 30px; color: #222222; margin-top: 24px; font-family: arial; background-color: #ffffff;"> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="9fa25f425c0c7551cdc9fb89f3b50dc9" data-from-paste="undefined">3、</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="da4b7c60a4b91f8541050cfae1d69531">光学涂覆工业：高、低折射率薄膜如</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e9022f6af8928e73b0341fe9d74a5f44">SiO2</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="b834f718daa122876ce902aa6a723817">，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="90dd64fab965ced7de201b60b890f16b">TiO2</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="dab2cb88c66b3ecb79c811794535f4d0">，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e75fa9a945648e7de97893c8ca638ba3">Ta2O5</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="522e535fbe827b6728b1394383d627d7">，</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="3ee9e17f7a3c1b86e152b24ffd0fc46f">MgF2</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c9daf4dbaea685ff640ada358def30d7">，等。</span></p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"> </p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="7810381fc4060423a28bc5e7ea81e79e"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="74725e348c8d620c26d04a610b25e761" data-from-paste="1">4</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="a7cbd85f6758a09a9a7d2b687af31e2d">、显示行业：导电层（如</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="d90aeca0c4a1a4065eb1cb6f64648700" data-from-paste="1">ITO</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="91d8e6a2f723182b3cba3c21ae43d250">），非晶硅薄膜、有机薄膜（</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="34b5345e90bbd24cc1362a4ca61f0e2a" data-from-paste="1">OLED</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e276a794f0e09cfe01b8c81fc96e8177">技术）。</span></span></p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"> </p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="1c57c2d60cde2554a8b474e35cbbd212"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="8c8a162df7445ef5e064e7de52c7d32a" data-from-paste="1">5</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="787ca416df34dbdfd478faedaa37edec">、数据存储产业：类金刚石薄膜。</span></span></p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"> </p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="23ef849e08f729a24111fb7b01c94596"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="3e6ecb63d6a8f8941fd41ec4aee90063" data-from-paste="1">6</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="65bf88c1bd421c98015572f53f1629d0">、</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="1462eaf9852493e8299f63dd3ae7aeee" data-from-paste="1">R&D </span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8b9fb5b0699cf0e4e873007baa1cb70e">工序：薄膜沉积的原位表征（速率和光学常数）对应工艺条件的变化值，适用于</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="d76cc3af4382a729dff2cc69a620b140" data-from-paste="1">MBE</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="32942202df1722873248ca508dffbdb9">、</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="1cd1bd420fd4835d65d6d5514e7e7e1f" data-from-paste="1">MOCVD</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="b9030a55c634a0f378f5f2f4a2f2ce1f">、</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="abbd5e5cb20a821c78608380b99d784e" data-from-paste="1">ALD</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c02128a30a9a6a491d126b96581accae">、溅射等。</span></span></p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"> </p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="c95b140b26ea70f95af22d5fbfd0d131"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="d899e288eafcbeee65e2c628fbbe8fbf" data-from-paste="1">7</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="9942dfd8a862a5d568eeda5609a21911">、化学和生物：亚</span><span style="max-width: 100%;" data-fake="1" data-diagnose-id="5b4f62cbfd1cc5e7430068acf96229fa" data-from-paste="1">-</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c0f1a6b8ff700bfa97c84af929054a5b">单层材料吸附液体中的细胞实验检测。</span></span></p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"> </p> <p style="overflow-y: auto; max-width: 100%; line-height: 30px; margin: 0px !important; padding: 0px !important;"><span style="max-width: 100%; color: #000000;" data-from-paste="1" data-diagnose-id="400a03cffb704fd2275e47cedd56e5f4"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="f388d934359725145201326921c313c2" data-from-paste="1">8</span><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="61f1659f8e01f6591c3b4a1278906c33">、工业：在线监测和控制薄膜的厚度。</span></span></p> </div>