球差电镜测试价格及常见测试问题解答

<p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="902b81c1e16eadb8c8f45a19e0b788bb"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="c1cc6dd0c4ce2a186ad93f73e5b01702" data-from-paste="1">Q1 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="aa0a774a7d2a88c90b2843608d44c822">TEM，STEM和球差是三种透射模式吗？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="d1ec2fede311054eff29327e8e6e034d">答：TEM和STEM是两种成像模式；球差即为球面像差，是透镜像差中的一种，是影响TEM分辨率的主要因素之一。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="295f263ffd13af95185b5babce251bab"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="5e12e15a0c0931265affbbb9c8bc267c" data-from-paste="1">Q2 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="a6f00f96abf7ab7ffe07a48e7a587d8f">STEM模式对样品厚度的要求？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="c2490ef150ea8b62b3ac7cb0744d0949">答：做STEM模式时，样品厚度影响不大。但如果要拍原子相，原子相所在的区域厚度尽量小于50 nm。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="a1db6b9e8d34558fa3faecef0d874257"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="9c2cd7f48071ff3283f9c9158c3d7984" data-from-paste="1">Q3 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="3fe9d0028ff9bcb97c9df76a84eccfbd">拍摄非晶样品，加速电压需要调么？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="097d8ab1ea38db5d8f98b779c04f6834">答：非晶样品如果不耐电子辐照，可以在测试之前将电压降到60kV或80kV，但降低电压，仪器的分辨率会降低。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="b8db61aaf09032727380159e312a3c45"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="f4ff926d1ed13457f6b00a5e835207c0" data-from-paste="1">Q4 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="ef68e164ef6367cea8b6787724607e76">普通TEM设备能拍出STEM图像吗？还是说STEM需要用更高级的设备才能拍出来？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="3f2378c00732db3e6b5a63544e80c1b2">答：普通TEM如果配有STEM探头，是可以拍STEM像的。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="31db888f56ce5cf0dd4b5114c4473d3e"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="5a72497b2aef25789fc1638c958fdc38" data-from-paste="1">Q5 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="8613b343dba740794731aa0e5caa9ce5">样品拍TEM没问题，拍STEM时说发白，拍不了，这个是什么原因，需要怎么解决？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="92053ee7e8d2cda139ee939d9279474c">答：拍STEM时发白，是STEM模式常见的一种现象。主要原因是样品不耐电子辐照或者存放时间较长，产生了一些有机成分吸附在样品表面。可通过以下方法解决：①制样时样品浓度尽量小一点；②测试前将样品进行烘烤；③进样前进行等离子清洗；④用球差仪器beamshower功能减少样品污染。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="adb3824d8f7e0bfe87edeb2a8ffb8245"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="af0a19a7833e5aa92cbb9150a3cb1978" data-from-paste="1">Q6 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="4a72e8bc0a5cb5a44f0ab87bb478cab1">为什么STEM拍出来感觉比较模糊，没有TEM像清楚？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="b903ed085485c9ed360119645515472a">答：STEM成像有点类似于TEM的质厚忖度像，成像与元素的原子序数和样品厚度有关。如果样品很平整，比较薄，拍摄的清晰度很高，如果样品高低不平，清晰度会有影响。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="e6c50b4de7a15d88e3b651377438ea48"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="cf7d79cf35dd8879823c24896e2820e7" data-from-paste="1">Q7 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="5b02e195612da5765ff8a244254f690b">球差的衍射斑点跟普通电镜一样吗？？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="8137a5265f2fcfeac53ce232f713eb96">答：球差的衍射斑点跟普通高分辨电镜的衍射斑点是一样的。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="610fbdb07f228fed6a06ec2b8970bfa2"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="a09f882ba71b93d4789256da1767cfce" data-from-paste="1">Q8 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="48af0a71c8fb090e275ba14b8d2a9238">软件傅里叶变换出来的衍射斑点效果很差，分辨率越高越差？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="1595f1180a8d6fa97fa1bda35544248f">答：衍射斑点的效果主要看样品的结晶性。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="91de919813d31921297adcd5bf167d57"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="0fc3768c11472da8166d8a3946d301b9" data-from-paste="1">Q9 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="ba348d18246a0ebcf92f13d0242d4d01">SEM和TEM的EDS分析区域大小和分析精度一样吗？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="909771917891221715554d8a3a04f903">答：不一样。SEM分析区域比TEM大，球差电镜可以做原子级别的元素分析，SEM分析精度要低于TEM。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="5dba2c75c8777ecb73468f23e64b0481"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="b59656e12be30360dc7b315a49cc29f6" data-from-paste="1">Q10 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="f915d1f204bd7dd58a19f359b7f8e079">单原子样品拍mapping时，能扫出一个个原子的点吗？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="beee8df7a659adaf39726132b822455f">答：可以扫出一个个点，但是一般很难跟拍摄照片对应起来。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="696778767dab9a6095c70b602e1f3a40"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="57e98a3f0bb4c8e61dd7914bc0ce6f24" data-from-paste="1">Q11 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="eb5aa06f4b7f91eb311035880f393876">对单原子来说，除了球差电镜外，像XRD等可以辅助证明吗？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="aad94b59d928654b7111baa18b2ca39c">答：单原子可通过TEM、EDS等分析，一般通过球差和同步辐射来验证猜想。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="cca1ba95accbe3f6e51cd245495b353a"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="ec1cbba1114fe18687a68c9b48509c75" data-from-paste="1">Q12 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="aa3eb61fe0239dbe7f7c4f474e159e0e">球差原始数据如何得到滤波像？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="dfe1c6e5125b4dcbe2594e3e94bb5dd2">答：可以通过DM软件中FFT变换得到滤波像。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="dfe1c6e5125b4dcbe2594e3e94bb5dd2"><span style="max-width: 100%;" data-fake="1" data-diagnose-id="ec1cbba1114fe18687a68c9b48509c75" data-from-paste="1">Q13 </span><span style="max-width: 100%; caret-color: red;" data-from-paste="1" data-diagnose-id="aa3eb61fe0239dbe7f7c4f474e159e0e">球差透射电镜测试价格标准是什么样的？</span></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; line-height: 30px; background-color: #ffffff; margin: 0px !important; padding: 0px !important;" data-from-paste="1"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="dfe1c6e5125b4dcbe2594e3e94bb5dd2"><span style="max-width: 100%;" data-from-paste="1" data-diagnose-id="aa3eb61fe0239dbe7f7c4f474e159e0e"><span style="color: #222222; font-family: arial;"><span style="font-size: 18px; caret-color: #ff0000;">科兴测试平台可做EDS-mapping及EELS-mapping，价格大概在2400元/时起。</span></span></span></span></p>