TOF-SIMS工作原理及测试用途

<p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important; text-align: left;" data-from-paste="1"><span style="font-family: 'book antiqua', palatino, serif;"><strong style="max-width: 100%;" data-from-paste="1" data-diagnose-id="f1e254f8cf5540d042b92fa8881b6b82">TOF-SIMS工作原理</strong></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important; text-align: left;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; background-image: initial; background-position: initial; background-size: initial; background-repeat: initial; background-attachment: initial; background-origin: initial; background-clip: initial; color: #000000; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="9404bfc3ec89d4097e634820858ffa66">1. 利用聚焦的一次离子束在样品上进行稳定的轰击，一次离子可能受到样品表面的背散射（概率很小），也可能穿透固体样品表面的一些原子层深入到一定深度，在穿透过程中发生一系列弹性和非弹性碰撞。一次离子将其部分能量传递给晶格原子，这些原子中有一部分向表面运动，并把能量传递给表面离子使之发射，这种过程称为粒子溅射。在一次离子束轰击样品时，还有可能发生另外一些物理和化学过程：一次离子进入晶格，引起晶格畸变；在具有吸附层覆盖的表面上引起化学反应等。溅射粒子大部分为中性原子和分子，小部分为带正、负电荷的原子、分子和分子碎片；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; background-image: initial; background-position: initial; background-size: initial; background-repeat: initial; background-attachment: initial; background-origin: initial; background-clip: initial; color: #000000; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="584752432ebc7dc0fefc5637c352ee68">2. 电离的二次粒子（溅射的原子、分子和原子团等）按质荷比实现质谱分离；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; background-image: initial; background-position: initial; background-size: initial; background-repeat: initial; background-attachment: initial; background-origin: initial; background-clip: initial; color: #000000; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="3773adddb01f25a48b09dd90f61831f9">3. 收集经过质谱分离的二次离子，可以得知样品表面和本体的元素组成和分布。在分析过程中，质量分析器不但可以提供对于每一时刻的新鲜表面的多元素分析数据。而且还可以提供表面某一元素分布的二次离子图像。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; background-image: initial; background-position: initial; background-size: initial; background-repeat: initial; background-attachment: initial; background-origin: initial; background-clip: initial; color: #000000; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="d7efbe50659ba5b24c6b6e0515b1e7fe">4. TOF（Time of Flight）的独特之处在于其离子飞行时间只依赖于他们的质量。由于其一次脉冲就可得到一个全谱，离子利用率最高，能最好地实现对样品几乎无损的静态分析，而其更重要的特点是只要降低脉冲的重复频率就可扩展质量范围，从原理上不受限制。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important; text-align: left;" data-from-paste="1"><span style="font-family: 'book antiqua', palatino, serif;"><strong style="max-width: 100%;" data-from-paste="1" data-diagnose-id="92f7468b76404bca43f205e6f9d7fe1a">TOF-SIMS测试用途</strong></span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; background-color: #ffffff; margin: 0px !important; padding: 0px !important; text-align: left;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; color: black; border: 1px none windowtext; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="612dfb2ef44793e79aa4de05b9c05558">1、可对H-U元素进行定性分析（定量需标样），检测极限可达ppm或更低的浓度；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; color: black; border: 1px none windowtext; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="608157f379c61dba9d4fa39cc279d155">2、良好的深度分辨率（0.1～1 nm），但溅射速率很慢（＜1μm/H）；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="89fd35f9486af161dbbe5a477123bddd">3、有机物的表面表征，可对元素进行面分布分析，分辨率为5～10nm；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="ef24b4db94213f95832da4aa75ed446e">4、鉴别在金属、玻璃、陶瓷、薄膜或粉末表面上的有机物层或无机物层，能对有机物进行分析且直接输出其分子式；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="b10f3b1e1dbb03665d8af2251dad6ee8">5、极小小面积分析，最小区域可达直径80nm；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="c65ae025cd2a72d7b72922c5e687ee70">6、可给出样品的三维图像信息；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="ebcf6da7474f1bdfbdeeb31e1602a637">7、同位素丰度分析；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="9be079544fd93036476c50e55d527845">8、当产品表面膜层太薄，无法使用常规测试进行成分分析，可选择TOF-SIMS进行分析，利用TOF-SIMS可定性分析膜层的成分；</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="max-width: 100%; font-family: 'book antiqua', palatino, serif;" data-from-paste="1" data-diagnose-id="4732ab1a8f8e1f59f96cc2e974a49e92">9、当膜层与基材截面出现分层等问题，但是未能观察到明显的异物痕迹，可使用TOF-SIMS分析表面痕量物质成分，以确定截面是否存在外来污染，检出限高达ppm级别。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"><span style="font-family: 'book antiqua', palatino, serif;">科兴测试平台可做TOF-SIMS测试，用一次离子激发样品表面，打出机器微量的二次离子，根据二次离子因不同的质量二飞行岛探测器的时间不同来测定离子质量，测试价格900元/样起。</span></p> <p style="max-width: 100%; font-size: 18px; line-height: 30px; color: #222222; font-family: arial; text-align: justify; background: white; padding: 0px !important; margin: 10px 0px !important 10px 0px !important;" data-from-paste="1"> </p>